{"title":"Transversely varying thickness-extensional modes in thin film bulk acoustic wave piezoelectric filters with interdigital electrodes","authors":"Jing Liu, Jianke Du, Ji Wang, Jia-shi Yang","doi":"10.1080/07315171.2019.1647711","DOIUrl":null,"url":null,"abstract":"Abstract We study free vibrations of thin-film bulk acoustic wave filters theoretically using the scalar differential equations by Tiersten and Stevens. The filters are made from piezoelectric crystal films of AlN or ZnO on Si substrates with interdigital ground and driving electrodes. They operate with thickness-extensional modes. Transversely varying modes with variations in both of the in-plane directions along and perpendicular to the electrodes are obtained, including both the device operating modes and unwanted modes which need to be predicted and avoided through design.","PeriodicalId":50451,"journal":{"name":"Ferroelectrics Letters Section","volume":"16 1","pages":"19 - 29"},"PeriodicalIF":1.3000,"publicationDate":"2019-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ferroelectrics Letters Section","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1080/07315171.2019.1647711","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
引用次数: 2
Abstract
Abstract We study free vibrations of thin-film bulk acoustic wave filters theoretically using the scalar differential equations by Tiersten and Stevens. The filters are made from piezoelectric crystal films of AlN or ZnO on Si substrates with interdigital ground and driving electrodes. They operate with thickness-extensional modes. Transversely varying modes with variations in both of the in-plane directions along and perpendicular to the electrodes are obtained, including both the device operating modes and unwanted modes which need to be predicted and avoided through design.
期刊介绍：
Ferroelectrics Letters is a separately published section of the international journal Ferroelectrics. Both sections publish theoretical, experimental and applied papers on ferroelectrics and related materials, including ferroelastics, ferroelectric ferromagnetics, electrooptics, piezoelectrics, pyroelectrics, nonlinear dielectrics, polymers and liquid crystals.
Ferroelectrics Letters permits the rapid publication of important, quality, short original papers on the theory, synthesis, properties and applications of ferroelectrics and related materials.
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