{"title":"Evaluation of adhesion materials for gold line-and-space surface plasmon antenna on SOI-MOS photodiode","authors":"H. Satoh, Yuki Matsuo, H. Inokawa, A. Ono","doi":"10.1109/SNW.2010.5562555","DOIUrl":null,"url":null,"abstract":"In order to improve the light sensitivity of silicon-on-insulator metal-insulator-semiconductor (SOI-MOS) photodiode, differences caused by the adhesion materials for gold (Au) line-and-space (L/S) surface plasmon (SP) antenna are evaluated based on the electromagnetic simulation. Furthermore, the rejection ratio for polarized light with silicon nitride (Si3N4) adhesion layer is analyzed.","PeriodicalId":6433,"journal":{"name":"2010 Silicon Nanoelectronics Workshop","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2010-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 Silicon Nanoelectronics Workshop","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SNW.2010.5562555","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
In order to improve the light sensitivity of silicon-on-insulator metal-insulator-semiconductor (SOI-MOS) photodiode, differences caused by the adhesion materials for gold (Au) line-and-space (L/S) surface plasmon (SP) antenna are evaluated based on the electromagnetic simulation. Furthermore, the rejection ratio for polarized light with silicon nitride (Si3N4) adhesion layer is analyzed.
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