{"title":"MULTIBEAM PROJECTION MICROINTERFEROMETER WITH AN IMAGE AMPLIFIER","authors":"A. M. Bakiev, S. Valiev, N. V. Kryazhev","doi":"10.1070/QE1992V022N08ABEH003589","DOIUrl":null,"url":null,"abstract":"An experimental investigation was made of the principal properties of a multibeam projection microinterferometer with a copper-vapor image amplifier. The optical system and the operating principle of the microinterferometer are described. It is shown that the lower limit of the height of a microstructure which can be determined is less than 10 nm. If the edges of the microstructure are sharp, the upper limit can reach 5λ, where λ = 0.5782 μm is the wavelength of the radiation of the copper-vapor image amplifier.","PeriodicalId":21878,"journal":{"name":"Soviet Journal of Quantum Electronics","volume":"22 1","pages":"749-752"},"PeriodicalIF":0.0000,"publicationDate":"1992-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Soviet Journal of Quantum Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1070/QE1992V022N08ABEH003589","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
An experimental investigation was made of the principal properties of a multibeam projection microinterferometer with a copper-vapor image amplifier. The optical system and the operating principle of the microinterferometer are described. It is shown that the lower limit of the height of a microstructure which can be determined is less than 10 nm. If the edges of the microstructure are sharp, the upper limit can reach 5λ, where λ = 0.5782 μm is the wavelength of the radiation of the copper-vapor image amplifier.
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