Anitha Balakrishnan, G. Supriya, Deepak Kumar Sharma, Ashwini Jambhalikar, M. S. Giridhar, J. John
{"title":"Design and fabrication process development of MEMS quadrupole mass filter for space applications","authors":"Anitha Balakrishnan, G. Supriya, Deepak Kumar Sharma, Ashwini Jambhalikar, M. S. Giridhar, J. John","doi":"10.1007/s41683-023-00112-4","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":91892,"journal":{"name":"ISSS journal of micro and smart systems","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISSS journal of micro and smart systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s41683-023-00112-4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}