U. Zastrow, R. Loo, K. Szot, J. Moers, T. Grabolla, D. Behammer, L. Vescan
{"title":"SIMS depth profiling of vertical p-channel Si-MOS transistor structures","authors":"U. Zastrow, R. Loo, K. Szot, J. Moers, T. Grabolla, D. Behammer, L. Vescan","doi":"10.1007/S002160050384","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":12375,"journal":{"name":"Fresenius' Journal of Analytical Chemistry","volume":"62 1","pages":"203-207"},"PeriodicalIF":0.0000,"publicationDate":"1997-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Fresenius' Journal of Analytical Chemistry","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/S002160050384","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}