R. Amin, R. Maiti, Yaliang Gui, C. Suer, M. Miscuglio, E. Heidari, Ray T. Chen, H. Dalir, V. Sorger
{"title":"λ-compact ITO Plasmonic Mach-Zehnder Modulator on Si","authors":"R. Amin, R. Maiti, Yaliang Gui, C. Suer, M. Miscuglio, E. Heidari, Ray T. Chen, H. Dalir, V. Sorger","doi":"10.1364/FIO.2020.FM4E.3","DOIUrl":null,"url":null,"abstract":"We demonstrate an integrated wavelength-compact plasmonic ITO-based Mach-Zehnder electro-optic modulator on Si platform, within a miniscule phase-shifter length of 2.5 µm, featuring a half-wave voltage and active device length product of VπL = 95 V·µm.","PeriodicalId":91683,"journal":{"name":"Frontiers in optics. Annual Meeting of the Optical Society of America","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2020-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Frontiers in optics. Annual Meeting of the Optical Society of America","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/FIO.2020.FM4E.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We demonstrate an integrated wavelength-compact plasmonic ITO-based Mach-Zehnder electro-optic modulator on Si platform, within a miniscule phase-shifter length of 2.5 µm, featuring a half-wave voltage and active device length product of VπL = 95 V·µm.