λ-compact ITO Plasmonic Mach-Zehnder Modulator on Si

R. Amin, R. Maiti, Yaliang Gui, C. Suer, M. Miscuglio, E. Heidari, Ray T. Chen, H. Dalir, V. Sorger
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Abstract

We demonstrate an integrated wavelength-compact plasmonic ITO-based Mach-Zehnder electro-optic modulator on Si platform, within a miniscule phase-shifter length of 2.5 µm, featuring a half-wave voltage and active device length product of VπL = 95 V·µm.
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硅基λ-紧凑ITO等离子体马赫-曾德调制器
我们在Si平台上展示了一种集成波长紧凑的基于等离子体ito的Mach-Zehnder电光调制器,其移相器长度为2.5µm,半波电压和有源器件长度乘积为Vπ l = 95 V·µm。
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