{"title":"Sol-gel fabricated thick piezoelectric ultrasonic transducers for potential applications in industrial material processes","authors":"L. Zou, M. Sayer, C. Jen","doi":"10.1109/ULTSYM.1997.661751","DOIUrl":null,"url":null,"abstract":"Sol-gel fabricated thick film broadband piezoelectric ultrasonic transducers (UTs) operating at a frequency below 10 MHz are presented. The UTs are formed using thick PZT and LiNbO/sub 3/ films which are ceramic-ceramic composites formed by dispersing PZT and LiNbO/sub 3/ particles in a PZT and LiNbO/sub 3/ sol-gel solution, respectively. Films are directly deposited on stainless steel substrates. Excellent broadband signals have been experimentally obtained with piezoelectric PZT and LiNbO/sub 3/ films with 1 cm diameter and a thickness between 40-50 /spl mu/m.","PeriodicalId":6369,"journal":{"name":"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)","volume":"19 1","pages":"1007-1012 vol.2"},"PeriodicalIF":0.0000,"publicationDate":"1997-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1997.661751","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 16
Abstract
Sol-gel fabricated thick film broadband piezoelectric ultrasonic transducers (UTs) operating at a frequency below 10 MHz are presented. The UTs are formed using thick PZT and LiNbO/sub 3/ films which are ceramic-ceramic composites formed by dispersing PZT and LiNbO/sub 3/ particles in a PZT and LiNbO/sub 3/ sol-gel solution, respectively. Films are directly deposited on stainless steel substrates. Excellent broadband signals have been experimentally obtained with piezoelectric PZT and LiNbO/sub 3/ films with 1 cm diameter and a thickness between 40-50 /spl mu/m.
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