{"title":"Secondary ion yields of polymers","authors":"T. Ogama, H. Kurokawa, I. Karino","doi":"10.1016/0378-5963(85)90039-X","DOIUrl":null,"url":null,"abstract":"<div><p>The secondary ion yields of polytetrafluoroethylene (PTFE) and polyethylene (PE) were compared with that of Al<sup>+</sup> emitted from Al<sub>2</sub>O<sub>3</sub> using mixed samples of their powders. The surface compositions of mixtures were measured by means of X-ray photoemission spectroscopy (XPS). Secondary ion mass spectrometry (SIMS) measurements with 1 keV Ar<sup>+</sup> showed that the secondary ion yields of CF<sup>+</sup> from PTFE and C<sub>2</sub>H<sup>+</sup><sub>3</sub> from PE were ∼ 20 and ∼ 4 times larger than that of Al<sup>+</sup> from Al<sub>2</sub>O<sub>3</sub>, respectively. The sputtering yield of PTFE was also examined by weight loss measurements; the results suggest that the large secondary ion yield of PTFE is primarily due to its large sputtering yield.</p></div>","PeriodicalId":100105,"journal":{"name":"Applications of Surface Science","volume":"22 ","pages":"Pages 82-89"},"PeriodicalIF":0.0000,"publicationDate":"1985-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0378-5963(85)90039-X","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applications of Surface Science","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/037859638590039X","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The secondary ion yields of polytetrafluoroethylene (PTFE) and polyethylene (PE) were compared with that of Al+ emitted from Al2O3 using mixed samples of their powders. The surface compositions of mixtures were measured by means of X-ray photoemission spectroscopy (XPS). Secondary ion mass spectrometry (SIMS) measurements with 1 keV Ar+ showed that the secondary ion yields of CF+ from PTFE and C2H+3 from PE were ∼ 20 and ∼ 4 times larger than that of Al+ from Al2O3, respectively. The sputtering yield of PTFE was also examined by weight loss measurements; the results suggest that the large secondary ion yield of PTFE is primarily due to its large sputtering yield.
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