Atomic force microscopy studies on sulfur-, selenium- and tellurium-based metal chalcogenide thin films: A review

Abstract

Sulfur, selenium and tellurium-based metal chalcogenide films have been prepared using various deposition methods. Investigation of morphological properties of the generated surface structures on chalcogenide thin films using atomic force microscopy technique was reported. The purpose of this work is to describe past important research findings that are related to atomic force microscopy technique.    Key words: Atomic force microscopy, surface roughness, film thickness, grain size.