{"title":"Trapped thickness-extensional modes in high overtone thin film bulk acoustic wave piezoelectric resonators","authors":"Jing Liu, Jianke Du, Ji Wang, Jia-shi Yang","doi":"10.1080/07315171.2018.1499362","DOIUrl":null,"url":null,"abstract":"Abstract We perform a theoretical analysis on thin film bulk acoustic wave piezoelectric resonators operating with high overtone thickness-extensional modes. The scalar differential equations by Tiersten and Stevens are used for the electroded and unelectroded parts of the resonator, respectively. An analytical solution is obtained for the free vibration of the resonator. Frequencies and modes are calculated based on the solution. Numerical results show that there exist modes with vibration mainly trapped under the driving electrode. The effects of the structural parameters on the behaviors of the trapping are examined.","PeriodicalId":50451,"journal":{"name":"Ferroelectrics Letters Section","volume":"20 1","pages":"38 - 48"},"PeriodicalIF":1.3000,"publicationDate":"2018-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ferroelectrics Letters Section","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1080/07315171.2018.1499362","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
引用次数: 3
Abstract
Abstract We perform a theoretical analysis on thin film bulk acoustic wave piezoelectric resonators operating with high overtone thickness-extensional modes. The scalar differential equations by Tiersten and Stevens are used for the electroded and unelectroded parts of the resonator, respectively. An analytical solution is obtained for the free vibration of the resonator. Frequencies and modes are calculated based on the solution. Numerical results show that there exist modes with vibration mainly trapped under the driving electrode. The effects of the structural parameters on the behaviors of the trapping are examined.
期刊介绍：
Ferroelectrics Letters is a separately published section of the international journal Ferroelectrics. Both sections publish theoretical, experimental and applied papers on ferroelectrics and related materials, including ferroelastics, ferroelectric ferromagnetics, electrooptics, piezoelectrics, pyroelectrics, nonlinear dielectrics, polymers and liquid crystals.
Ferroelectrics Letters permits the rapid publication of important, quality, short original papers on the theory, synthesis, properties and applications of ferroelectrics and related materials.
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