{"title":"Characterization of advanced epitaxial structures","authors":"B. Hamilton , A.R. Parker","doi":"10.1016/0146-3535(89)90012-9","DOIUrl":null,"url":null,"abstract":"<div><p>The evolution of the MOVPE growth technology has led to highly pure materials and to complex multi-layer structures. In turn this has led to new challenges for the characterisation of materials, and experimental methods are also evolving to meet this challenge. In this review we attempt to focus attention on techniques which probe some of the key materials parameters for advanced structures: Ultra high purity layers and atomically sharp systems.</p></div>","PeriodicalId":101046,"journal":{"name":"Progress in Crystal Growth and Characterization","volume":"19 1","pages":"Pages 51-62"},"PeriodicalIF":0.0000,"publicationDate":"1989-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0146-3535(89)90012-9","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Progress in Crystal Growth and Characterization","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0146353589900129","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The evolution of the MOVPE growth technology has led to highly pure materials and to complex multi-layer structures. In turn this has led to new challenges for the characterisation of materials, and experimental methods are also evolving to meet this challenge. In this review we attempt to focus attention on techniques which probe some of the key materials parameters for advanced structures: Ultra high purity layers and atomically sharp systems.
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