{"title":"Research on Novel Thermal Insulation Structure of CMOS-MEMS Thermopile","authors":"Kai-Chung Yu, Chih-Hsiung Shen","doi":"10.1109/IET-ICETA56553.2022.9971595","DOIUrl":null,"url":null,"abstract":"In this research, we discuss and analyze the thermal insulation microstructure which appropriately reduce the thermal conductivity and form a local channel where the heat flow is concentrated. As the channel becomes smaller, the thermal resistance increases and the noise will also increase. For the Johnson noise, the bandwidth can be reduced through subsequent electronic circuit signal processing. Although the response speed is sacrificed, the overall thermal sensing signal is improved in practical applications without introducing additional noise.","PeriodicalId":46240,"journal":{"name":"IET Networks","volume":"1 1","pages":"1-2"},"PeriodicalIF":1.3000,"publicationDate":"2022-10-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IET Networks","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IET-ICETA56553.2022.9971595","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"COMPUTER SCIENCE, INFORMATION SYSTEMS","Score":null,"Total":0}
引用次数: 0
Abstract
In this research, we discuss and analyze the thermal insulation microstructure which appropriately reduce the thermal conductivity and form a local channel where the heat flow is concentrated. As the channel becomes smaller, the thermal resistance increases and the noise will also increase. For the Johnson noise, the bandwidth can be reduced through subsequent electronic circuit signal processing. Although the response speed is sacrificed, the overall thermal sensing signal is improved in practical applications without introducing additional noise.
IET NetworksCOMPUTER SCIENCE, INFORMATION SYSTEMS-
CiteScore
5.00
自引率
0.00%
发文量
41
审稿时长
33 weeks
期刊介绍：
IET Networks covers the fundamental developments and advancing methodologies to achieve higher performance, optimized and dependable future networks. IET Networks is particularly interested in new ideas and superior solutions to the known and arising technological development bottlenecks at all levels of networking such as topologies, protocols, routing, relaying and resource-allocation for more efficient and more reliable provision of network services. Topics include, but are not limited to: Network Architecture, Design and Planning, Network Protocol, Software, Analysis, Simulation and Experiment, Network Technologies, Applications and Services, Network Security, Operation and Management.
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