A new method to determine backscattering factors for quantitative Auger analysis

Abstract

The backscattering factor is the most important parameter for matrix effect corrections in quantitative Auger analysis. Some of the methods previously published are reviewed. A new method is described for determining the backscattering factor using information provided by the background which is usually ignored in an Auger spectrum. Complicated calculations such as The Monte Carlo method were avoided, and the accuracy might be further improved since both the intensity of Auger electrons and the energy distribution of backscattered electrons were obtained under the same experimental conditions. The results are illustrated by a quantitative analysis of two copper alloys, Au-Cu and Ag-Cu.