W. Frentrup, M. Griepertrog, H. Klose, G. Kreysch, U. Müller‐Jahreis
{"title":"The Influence of Alkali Atoms Implanted in Silicon on the Negative Secondary Ion Emission","authors":"W. Frentrup, M. Griepertrog, H. Klose, G. Kreysch, U. Müller‐Jahreis","doi":"10.1002/PSSA.2210840134","DOIUrl":null,"url":null,"abstract":"The influence of alkali metal implantations in silicon on the negative secondary ion emission is studied. It is observed that the effect of negative ion signal enhancement decreases with increasing ionization potential from Cs to Na but depends lineary on the alkali volume concentration for all alkali metals. Natrium exhibits a somewhat deviating behaviour, which can be explained by its comparable high ionization potential. \n \n \n \nEs wird der Einflus von Alkalimetallimplantationen auf die negative Sekundarionenemission in Silizium untersucht. Der Effekt der Erhohung der Ausbeute an negativen Ionen verringert sich mit wachsendem Ionisationspotential von Cs zu Na, hangt aber linear von der Alkalivolumenkonzentration fur alle Alkalimetalle ab. Natrium zeigt ein etwas abweichendes Verhalten, was mit seinem relativ hohen Ionisationspotential erklart werden kann.","PeriodicalId":17793,"journal":{"name":"July 16","volume":"12 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"1984-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"July 16","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/PSSA.2210840134","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The influence of alkali metal implantations in silicon on the negative secondary ion emission is studied. It is observed that the effect of negative ion signal enhancement decreases with increasing ionization potential from Cs to Na but depends lineary on the alkali volume concentration for all alkali metals. Natrium exhibits a somewhat deviating behaviour, which can be explained by its comparable high ionization potential.
Es wird der Einflus von Alkalimetallimplantationen auf die negative Sekundarionenemission in Silizium untersucht. Der Effekt der Erhohung der Ausbeute an negativen Ionen verringert sich mit wachsendem Ionisationspotential von Cs zu Na, hangt aber linear von der Alkalivolumenkonzentration fur alle Alkalimetalle ab. Natrium zeigt ein etwas abweichendes Verhalten, was mit seinem relativ hohen Ionisationspotential erklart werden kann.
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