Growth of ZnO Nanorod Film on Glass Substrate by Nitric Acid Assisted Aqueous Solution Deposition

RAN Pub Date : 2017-04-01 DOI:10.11159/ICNNFC17.121
Ming-kwei Lee, Mu Wang, Hao Wang, Chang-Chin Tsai, Cheng-Yu Kung, Chiamin Yang, Huan-Chi Lung
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Abstract

In this paper, the growth of ZnO nanorod film transformed from ZnO nanorod array on glass substrate was investigated. ZnO seed layer was first prepared on substrate by RF sputtering. Zinc nitrate and hexamethylenetetramine were used as precursors for the growth of ZnO nanorod array on glass substrate at 50 o C. The aqueous solution was assisted with the incorporation of nitric acid to increase the growth rate and the grain size of ZnO nanorod. With the growth time, ZnO nanorod film is gradually transformed from ZnO nanorod array.
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硝酸辅助水溶液沉积法在玻璃基板上生长ZnO纳米棒薄膜
本文研究了由ZnO纳米棒阵列在玻璃衬底上转化成ZnO纳米棒薄膜的生长。采用射频溅射法制备了ZnO种子层。以硝酸锌和六亚甲基四胺为前驱体,在50℃条件下在玻璃基板上生长ZnO纳米棒阵列,并在硝酸的辅助下提高ZnO纳米棒的生长速度和晶粒尺寸。随着生长时间的延长,ZnO纳米棒阵列逐渐转变为ZnO纳米棒薄膜。
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RAN
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