P. Gu, L. M. Zhao, C. Wan, L. Zhang, L. Kang, P. Wu
{"title":"Multi-photon response of photon-number-resolving superconducting single photon detector","authors":"P. Gu, L. M. Zhao, C. Wan, L. Zhang, L. Kang, P. Wu","doi":"10.1109/IRMMW-THZ.2015.7327929","DOIUrl":null,"url":null,"abstract":"A new photon-number-resolving superconducting single photon detector is fabricated and tested. To integrate the resistors connected to the nanowire, we used one step of electron-beam lithography and four subsequent photolithography steps. A micro cavity was introduced to the structure in order to gain relatively high quantum efficiency. The device fabricated could resolve 6 photons.","PeriodicalId":6577,"journal":{"name":"2015 40th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz)","volume":"1 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2015-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 40th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRMMW-THZ.2015.7327929","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A new photon-number-resolving superconducting single photon detector is fabricated and tested. To integrate the resistors connected to the nanowire, we used one step of electron-beam lithography and four subsequent photolithography steps. A micro cavity was introduced to the structure in order to gain relatively high quantum efficiency. The device fabricated could resolve 6 photons.
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