{"title":"Investigation of Metal Oxide Film by Atomic Layer Deposition for Electronic Device","authors":"T. Nabatame","doi":"10.4139/sfj.74.137","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17564,"journal":{"name":"Journal of The Surface Finishing Society of Japan","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of The Surface Finishing Society of Japan","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4139/sfj.74.137","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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