HIGH PERFORMANCE MULTILAYER NOTCH OPTICAL FILTERS FOR HIGH ENERGY DETECTOR APPLICATIONS AND THEIR COATING PROCESS CONTROL

Pub Date : 2004-07-01 DOI:10.1142/9789812702708_0043
S. Maltezos, E. Fokitis, D. Kouzis-Loukas, R. Liarokapi
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引用次数: 1

Abstract

High-performance and precision multilayer notch optical filters, designed and optimized to be used in high energy detector applications, are presented. As two typical examples, we present filters operating in the near UV and far UV range for air-fluorescence and RICH detectors, respectively. A proposed, improved coating process algorithm of optical monitoring during the fabrication of such filters has been developed and simulated. A prototype spectrograph equipped with fast readout electronics has been developed, aiming to be used for the thin film layer control in deposition plants.
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用于高能探测器的高性能多层陷波滤光片及其镀膜工艺控制
介绍了一种高性能、高精度的多层陷波滤光片,该滤光片经过设计和优化,可用于高能探测器。作为两个典型的例子,我们介绍了在近紫外和远紫外范围内工作的过滤器,分别用于空气荧光和RICH探测器。提出了一种改进的滤光片制作过程中光学监测的镀膜工艺算法,并进行了仿真。研制了一种具有快速读出电子器件的光谱仪原型,旨在用于沉积厂的薄膜层控制。
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