{"title":"基于Cl-和si浓度测量的SiCl4解离","authors":"A. Kunz, P. Roth","doi":"10.1016/S0082-0784(98)80413-X","DOIUrl":null,"url":null,"abstract":"<div><p>The dissociation of SiCl<sub>4</sub> was studied behind reflected shock waves. Atomic resonance absorption spectroscopy (ARAS) was applied for time-resolved measurements of Cl- and Si-atoms in gas mixtures containing 0.4 to 4 ppm SiCl<sub>4</sub> highly diluted in argon. The signals obtained were kinetically evaluated by computer simulations based on a simplified reaction mechanism. Rate coefficients for the reactions<span><span><span><math><mtable><mtr><mtd><msub><mo>SiCl</mo><mn>4</mn></msub><mo>+</mo><mo>Ar</mo><mover><mo>⇌</mo><mrow><msub><mi>k</mi><mn>1</mn></msub></mrow></mover><msub><mo>SiCl</mo><mn>3</mn></msub><mo>+</mo><mo>Cl</mo><mo>+</mo><mo>Ar</mo><mo>(</mo><mo>R</mo><mn>1</mn><mo>)</mo></mtd></mtr><mtr><mtd><mo>SiCl</mo><mo>+</mo><mo>Ar</mo><mover><mo>⇌</mo><mrow><msub><mi>k</mi><mn>4</mn></msub></mrow></mover><mo>Si</mo><mo>+</mo><mo>Cl</mo><mo>+</mo><mo>Ar</mo><mo>(</mo><mo>R</mo><mn>4</mn><mo>)</mo></mtd></mtr><mtr><mtd><msub><mo>k</mo><mn>1</mn></msub><mo>=</mo><mn>6.9</mn><mo>×</mo><msup><mn>10</mn><mrow><mn>16</mn></mrow></msup><mo>exp</mo><mo></mo><mo>(</mo><mo>−</mo><mn>37760</mn><mo>K</mo><mo>/</mo><mi>T</mi><mo>)</mo><msup><mo>cm</mo><mn>3</mn></msup><msup><mo>mol</mo><mrow><mo>−</mo><mn>1</mn></mrow></msup><msup><mo>s</mo><mrow><mo>−</mo><mn>1</mn></mrow></msup></mtd></mtr><mtr><mtd><msub><mi>k</mi><mn>4</mn></msub><mo>=</mo><mn>1.4</mn><mi>x</mi><msup><mn>10</mn><mrow><mn>40</mn></mrow></msup><msup><mi>T</mi><mrow><mo>−</mo><mn>7.0</mn></mrow></msup><mo>exp</mo><mo></mo><mo>(</mo><mo>−</mo><mn>49315</mn><mo>K</mo><mo>/</mo><mi>T</mi><mo>)</mo><msup><mo>cm</mo><mn>3</mn></msup><msup><mo>mol</mo><mrow><mo>−</mo><mn>1</mn></mrow></msup><msup><mo>s</mo><mrow><mo>−</mo><mn>1</mn></mrow></msup></mtd></mtr></mtable></math></span></span></span></p></div>","PeriodicalId":101203,"journal":{"name":"Symposium (International) on Combustion","volume":"27 1","pages":"Pages 261-267"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/S0082-0784(98)80413-X","citationCount":"11","resultStr":"{\"title\":\"Dissociation of SiCl4 based on Cl- and Si-concentration measurements\",\"authors\":\"A. Kunz, P. Roth\",\"doi\":\"10.1016/S0082-0784(98)80413-X\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>The dissociation of SiCl<sub>4</sub> was studied behind reflected shock waves. Atomic resonance absorption spectroscopy (ARAS) was applied for time-resolved measurements of Cl- and Si-atoms in gas mixtures containing 0.4 to 4 ppm SiCl<sub>4</sub> highly diluted in argon. The signals obtained were kinetically evaluated by computer simulations based on a simplified reaction mechanism. Rate coefficients for the reactions<span><span><span><math><mtable><mtr><mtd><msub><mo>SiCl</mo><mn>4</mn></msub><mo>+</mo><mo>Ar</mo><mover><mo>⇌</mo><mrow><msub><mi>k</mi><mn>1</mn></msub></mrow></mover><msub><mo>SiCl</mo><mn>3</mn></msub><mo>+</mo><mo>Cl</mo><mo>+</mo><mo>Ar</mo><mo>(</mo><mo>R</mo><mn>1</mn><mo>)</mo></mtd></mtr><mtr><mtd><mo>SiCl</mo><mo>+</mo><mo>Ar</mo><mover><mo>⇌</mo><mrow><msub><mi>k</mi><mn>4</mn></msub></mrow></mover><mo>Si</mo><mo>+</mo><mo>Cl</mo><mo>+</mo><mo>Ar</mo><mo>(</mo><mo>R</mo><mn>4</mn><mo>)</mo></mtd></mtr><mtr><mtd><msub><mo>k</mo><mn>1</mn></msub><mo>=</mo><mn>6.9</mn><mo>×</mo><msup><mn>10</mn><mrow><mn>16</mn></mrow></msup><mo>exp</mo><mo></mo><mo>(</mo><mo>−</mo><mn>37760</mn><mo>K</mo><mo>/</mo><mi>T</mi><mo>)</mo><msup><mo>cm</mo><mn>3</mn></msup><msup><mo>mol</mo><mrow><mo>−</mo><mn>1</mn></mrow></msup><msup><mo>s</mo><mrow><mo>−</mo><mn>1</mn></mrow></msup></mtd></mtr><mtr><mtd><msub><mi>k</mi><mn>4</mn></msub><mo>=</mo><mn>1.4</mn><mi>x</mi><msup><mn>10</mn><mrow><mn>40</mn></mrow></msup><msup><mi>T</mi><mrow><mo>−</mo><mn>7.0</mn></mrow></msup><mo>exp</mo><mo></mo><mo>(</mo><mo>−</mo><mn>49315</mn><mo>K</mo><mo>/</mo><mi>T</mi><mo>)</mo><msup><mo>cm</mo><mn>3</mn></msup><msup><mo>mol</mo><mrow><mo>−</mo><mn>1</mn></mrow></msup><msup><mo>s</mo><mrow><mo>−</mo><mn>1</mn></mrow></msup></mtd></mtr></mtable></math></span></span></span></p></div>\",\"PeriodicalId\":101203,\"journal\":{\"name\":\"Symposium (International) on Combustion\",\"volume\":\"27 1\",\"pages\":\"Pages 261-267\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/S0082-0784(98)80413-X\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Symposium (International) on Combustion\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S008207849880413X\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Symposium (International) on Combustion","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S008207849880413X","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Dissociation of SiCl4 based on Cl- and Si-concentration measurements
The dissociation of SiCl4 was studied behind reflected shock waves. Atomic resonance absorption spectroscopy (ARAS) was applied for time-resolved measurements of Cl- and Si-atoms in gas mixtures containing 0.4 to 4 ppm SiCl4 highly diluted in argon. The signals obtained were kinetically evaluated by computer simulations based on a simplified reaction mechanism. Rate coefficients for the reactions
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