使用MEMS活塞微镜的远程再聚焦显微镜

Proceedings of the Microscience Microscopy Congress 2023 incorporating EMAG 2023 Pub Date : 2023-07-06 DOI:10.22443/rms.mmc2023.199

Jay L. Christopher, L. Rooney, D. Uttamchandani, R. Bauer

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摘要

我们展示了一种远程再聚焦显微镜系统，其体积采集率高达150 Hz，使用具有可控活塞运动的微机电系统(MEMS)反射镜。占地面积小，价格合理，易于控制的2毫米反射镜可实现nm级焦平面对准精度，在100x 1.25 NA成像物镜下，整体轴向焦移可达225 μ m。

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Remote-refocus microscopy using a MEMS piston micromirror

Summary We demonstrate a remote-refocus microscopy system with volume acquisition rates of up to 150 Hz using a microelectromechanical systems (MEMS) mirror with controllable piston movement. The small footprint, affordable and easily controllable 2 mm mirror allows nm scale alignment precision of the focal plane, with an overall axial focus shift of up to 225 µm with a 100x 1.25 NA imaging objective.

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Proceedings of the Microscience Microscopy Congress 2023 incorporating EMAG 2023

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