密封纳米光束在硅光子- mems平台上的热机械噪声测量

2021 IEEE 17th International Conference on Group IV Photonics (GFP) Pub Date : 2021-12-01 DOI:10.1109/GFP51802.2021.9673877

Khannan Rajendran, Awanish Pandey, Pierre Edinger, Gaehun Jo, A. Takabayashi, U. Khan, P. Verheyen, N. Quack, F. Niklaus, W. Bogaerts, K. Gylfason, D. van Thourhout

{"title":"密封纳米光束在硅光子- mems平台上的热机械噪声测量","authors":"Khannan Rajendran, Awanish Pandey, Pierre Edinger, Gaehun Jo, A. Takabayashi, U. Khan, P. Verheyen, N. Quack, F. Niklaus, W. Bogaerts, K. Gylfason, D. van Thourhout","doi":"10.1109/GFP51802.2021.9673877","DOIUrl":null,"url":null,"abstract":"The thermal motion of a vacuum packaged, sus-pended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be $1.779 \\pm 0.022\\frac{{{\\text{fm}}}}{{\\sqrt {{\\text{Hz}}} }}$.","PeriodicalId":158770,"journal":{"name":"2021 IEEE 17th International Conference on Group IV Photonics (GFP)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform\",\"authors\":\"Khannan Rajendran, Awanish Pandey, Pierre Edinger, Gaehun Jo, A. Takabayashi, U. Khan, P. Verheyen, N. Quack, F. Niklaus, W. Bogaerts, K. Gylfason, D. van Thourhout\",\"doi\":\"10.1109/GFP51802.2021.9673877\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The thermal motion of a vacuum packaged, sus-pended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be $1.779 \\\\pm 0.022\\\\frac{{{\\\\text{fm}}}}{{\\\\sqrt {{\\\\text{Hz}}} }}$.\",\"PeriodicalId\":158770,\"journal\":{\"name\":\"2021 IEEE 17th International Conference on Group IV Photonics (GFP)\",\"volume\":\"37 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 IEEE 17th International Conference on Group IV Photonics (GFP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/GFP51802.2021.9673877\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 17th International Conference on Group IV Photonics (GFP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GFP51802.2021.9673877","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

测量了真空封装悬垂纳米光束和纳米光子波导在硅光子学- mems平台上的热运动。确定了观察到的力学模态的共振频率和q因子。我们还通过实验估计位移灵敏度为$1.779 \pm 0.022\frac{{{\text{fm}}}}{{\sqrt {{\text{Hz}}} }}$。

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Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform

The thermal motion of a vacuum packaged, sus-pended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be $1.779 \pm 0.022\frac{{{\text{fm}}}}{{\sqrt {{\text{Hz}}} }}$.

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2021 IEEE 17th International Conference on Group IV Photonics (GFP)

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