AlGaN光电二极管用于UVC, UVB和UVA光谱范围

I. Lamkin, M. Andreev, S. Tarasov, A. Solomonov, S. Kurin
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引用次数: 2

摘要

提出了一种基于Me-AlGaN肖特基势垒分离UVA、UVB和UVC光谱范围的紫外光电二极管技术。研究了改变AlGaN固溶体组成对制备的光电探测器长波长边缘光敏性的影响。考察了肖特基势垒金属对结构光敏性的影响。
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AlGaN photodiodes for UVC, UVB and UVA spectral ranges
A technology of ultraviolet photodiodes based on Me-AlGaN Schottky barrier separating in UVA, UVB and UVC spectral ranges was proposed. The effect of altering the AlGaN soild solution composition on the long-wavelength edge of photosensitivity of fabricated photodetector was studied. Influence of Schottky barrier metal on the value of structures photosensitivity was examined.
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