A. Shkel, Roberto Horowitz, Ashwin A. Seshia, Sungsu Park, Roger T. Howe
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We summarize principles of operation of micromachined gyroscopes, analyze dynamics of ideal and non-ideal systems, and propose an approach for formulation and solving problems of control. The suggested approach uses active nonlinear feedback control for drive and compensation of errors. Both non-adaptive and adaptive strategies are presented. These strategies can be used for a broad class of micromachined vibratory gyroscopes including those for angle and angular rate measurement.
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