L. Dimitrocenko, J. Grube, P. Kulis, A. Sarakovskis, M. Spriņģis, I. Tale
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引用次数: 1
摘要
AlGaN合金薄膜材料是紫外光谱区发光二极管(LED)的重要材料。探讨了金属有机化学气相沉积(MOCVD)技术生长的AlxGa1-xN (0 < x < 0.35)薄膜结构中深层本征态和杂质态Si的来源。利用时间分辨光致发光技术(PL)研究了不同合金组成的薄膜中晶格失配和硅掺杂对薄膜异质结构的影响。结果表明,由于晶格失配,在GaN缓冲层上生长的未掺杂的AlGaN合金中含有离子空位(v阳离子)缺陷的浓度增加,这些缺陷作为深度受体中心并导致PL。si掺杂导致了v阳离子浓度的额外增加,并且在阳离子亚晶格中形成了新的(vationsication)深度受体配合物。结果表明,随着AlGaN合金中Al含量的增加,深层受体中心Vcation和vationsication复合物的组成均出现紊乱。相应的宽PL波段被分解成若干个子波段。在未掺杂的GaN上沉积掺硅的AlGaN合金,形成掺硅的GaN间层。
Formation of deep acceptor centers in AlGaN alloys
AlGaN alloy thin film materials are of high interest for light emitting diodes (LED of the ultraviolet (UV) spectral region. Origin of the deep intrinsic and impurity Si states in the AlxGa1-xN (0 < x < 0.35) epilayer structures grown by metalorganic chemical vapor deposition (MOCVD) technique have been considered. Effects of the lattice mismatch and Si-doping in the heterostructures of epilayers with different alloy composition are investigated using time resolved photoluminescence (PL) of donor - deep acceptor (DA) pairs. It is shown that the undoped AlGaN alloys, grown on a GaN buffer layer, due to the lattice mismatch contain the increased concentration of cation vacancy (Vcation) defects acting as a deep acceptor centers and responsible for PL. Si-doping results in both the additional increase of Vcation concentration and the formation in cation sub lattice of new (VcationSication) deep acceptor complexes. It is shown that by increase of the Al content in the AlGaN alloy the composition disorder of both deep acceptor centers Vcation and (VcationSication) complex appears. The corresponding broad PL bands are resolved in number of subbands. It is stated that deposition of Si-doped AlGaN alloy on undoped GaN results in formation of Si-doped GaN interlayer.