基于聚酰亚胺固定岛状结构的微机械热转换装置

Int. J. Comput. Eng. Sci. Pub Date : 2003-09-01 DOI:10.1142/S146587630300171X

T. Lalinsky, M. Krnac, S. Hascik, Z. Mozolova, L. Matay, I. Kostic, P. Hrkut, J. Jakovenko, M. Husák

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引用次数: 4

摘要

介绍了一种新型基于砷化镓岛的微机械热转换器(MTC)器件的设计技术和特性。MTC器件由pHEMT作为微波加热器和薄膜多晶硅/镍电阻作为温度传感器单片集成在聚酰亚胺固定的1 μm厚GaAs/AlGaAs岛状结构上组成。给出了该装置电热转换评价的初步实验结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Micromechanical Thermal Converter Device Based On Polyimide-Fixed Island Structure

Design technology and characterization of new GaAs island based Micromechanical Thermal Converter (MTC) device are presented. The MTC device introduced consists of pHEMT as a microwave heater and thin film polySi/Ni resistor as a temperature sensor monolithically integrated on polyimide-fixed 1 μm thick GaAs/AlGaAs island structure. The preliminary experimental results in the device electro-thermal conversion evaluation are demonstrated.

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Int. J. Comput. Eng. Sci.

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