不同界面电荷长度对DB-NBTI降解的影响

R. Sun, Wei He, Jianmin Cao
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引用次数: 1

摘要

为了研究界面电荷对pMOSFET阈值电压的影响,本文提出了一种新的器件模型。通过将栅极氧化层划分为若干区域,并在不同区域设置不同的界面电荷,利用二维数值模拟方法,在考虑漏极偏置和界面电荷浓度的情况下,很好地模拟了界面电荷长度与阈值电压的关系。同时,通过比较不同模型的表面电位,探讨了阈值电压变化的机理。本研究可促进漏偏负偏温度不稳定性(DB-NBTI)效应的研究。
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Numerical simulation of DB-NBTI degradation introduced by different length of interface charges
To explore the influence of the interface charges on the threshold voltage of pMOSFET, we present a novel device model in this paper. By dividing the gate oxide layer into several regions, and setting different interface charges in different regions, the relationship between the interface charges' length and the threshold voltage is well simulated by using 2D numerical simulation, in which the conditions of drain biasing and interface charges' concentration are considered. At the same time, the mechanism of threshold voltage variation is also investigated by comparing the surface potentials of various models. The proposed work can promote the research on Drain Bias-Negative Bias Temperature Instability (DB-NBTI) effect.
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