跳跃式memgan:基于跳跃式连接和存储模块的集成生成对抗网络用于晶圆缺陷检测

Yang Li, Sanxin Jiang
{"title":"跳跃式memgan:基于跳跃式连接和存储模块的集成生成对抗网络用于晶圆缺陷检测","authors":"Yang Li, Sanxin Jiang","doi":"10.1109/CCISP55629.2022.9974164","DOIUrl":null,"url":null,"abstract":"To realize the automatic detection of wafer surface defects, we propose Skip-MemGANs unsupervised detection network, which is an ensemble generative adversarial network that automatically detects defects by the difference between the target image and the reconstructed image.The network is composed of three generators and three discriminators. Each generator uses encoder-decoder convolutional neural network with two layers of skip connection and memory module to capture multi-scale input image features. These generators are randomly paired with discriminators, and receive feedback from the three discriminators, while the discriminators receive reconstructed samples from the three generators.Compared with a single GAN, the ensemble GAN can better simulate the distribution of normal data in the high-dimensional image space.We evaluate the single GAN model, GAN ensemble model and other basic models. The results show that our proposed Skip-MemGANs network outperforms other models in wafer defect detection task, the AUC value reached 0.956.","PeriodicalId":431851,"journal":{"name":"2022 7th International Conference on Communication, Image and Signal Processing (CCISP)","volume":"165 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Skip-MemGANs: An Ensemble Generative Adversarial Network Based on Skip Connection and Memory Module for Wafer Defect Detection\",\"authors\":\"Yang Li, Sanxin Jiang\",\"doi\":\"10.1109/CCISP55629.2022.9974164\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"To realize the automatic detection of wafer surface defects, we propose Skip-MemGANs unsupervised detection network, which is an ensemble generative adversarial network that automatically detects defects by the difference between the target image and the reconstructed image.The network is composed of three generators and three discriminators. Each generator uses encoder-decoder convolutional neural network with two layers of skip connection and memory module to capture multi-scale input image features. These generators are randomly paired with discriminators, and receive feedback from the three discriminators, while the discriminators receive reconstructed samples from the three generators.Compared with a single GAN, the ensemble GAN can better simulate the distribution of normal data in the high-dimensional image space.We evaluate the single GAN model, GAN ensemble model and other basic models. The results show that our proposed Skip-MemGANs network outperforms other models in wafer defect detection task, the AUC value reached 0.956.\",\"PeriodicalId\":431851,\"journal\":{\"name\":\"2022 7th International Conference on Communication, Image and Signal Processing (CCISP)\",\"volume\":\"165 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 7th International Conference on Communication, Image and Signal Processing (CCISP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CCISP55629.2022.9974164\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 7th International Conference on Communication, Image and Signal Processing (CCISP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CCISP55629.2022.9974164","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

为了实现晶圆表面缺陷的自动检测,我们提出了skip - memgan无监督检测网络,该网络是一个集成生成对抗网络,通过目标图像与重建图像之间的差异自动检测缺陷。该网络由三个发生器和三个鉴别器组成。每个生成器使用两层跳跃连接和存储模块的编码器-解码器卷积神经网络捕获多尺度输入图像特征。这些生成器与鉴别器随机配对,并接收三个鉴别器的反馈,而鉴别器接收来自三个生成器的重构样本。与单一GAN相比,集成GAN可以更好地模拟高维图像空间中正态数据的分布。我们评估了单一GAN模型、GAN集成模型和其他基本模型。结果表明,我们提出的skip - memgan网络在晶圆缺陷检测任务中优于其他模型,AUC值达到0.956。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Skip-MemGANs: An Ensemble Generative Adversarial Network Based on Skip Connection and Memory Module for Wafer Defect Detection
To realize the automatic detection of wafer surface defects, we propose Skip-MemGANs unsupervised detection network, which is an ensemble generative adversarial network that automatically detects defects by the difference between the target image and the reconstructed image.The network is composed of three generators and three discriminators. Each generator uses encoder-decoder convolutional neural network with two layers of skip connection and memory module to capture multi-scale input image features. These generators are randomly paired with discriminators, and receive feedback from the three discriminators, while the discriminators receive reconstructed samples from the three generators.Compared with a single GAN, the ensemble GAN can better simulate the distribution of normal data in the high-dimensional image space.We evaluate the single GAN model, GAN ensemble model and other basic models. The results show that our proposed Skip-MemGANs network outperforms other models in wafer defect detection task, the AUC value reached 0.956.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
A reliable intra-relay cooperative relay network coupling with spatial modulation for the dynamic V2V communication Research on PCEP Extension for VLAN-based Traffic Forwarding in cloud network integration Analysis of the effect of carbon emissions on meteorological factors in Yunnan province Small Sample Signal Modulation Recognition based on Higher-order Cumulants and CatBoost AFMTD: Anchor-free Frame for Multi-scale Target Detection
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1