{"title":"基于一维光子晶体纳米束的应力传感","authors":"F. Hsiao, Zhen-Hong Yang","doi":"10.1109/ISSNIP.2014.6827615","DOIUrl":null,"url":null,"abstract":"We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si<sub>3</sub>N<sub>4</sub> layer is deposited above the waveguide. The thermal stress between Si/Si<sub>3</sub>N<sub>4</sub> induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.","PeriodicalId":269784,"journal":{"name":"2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2014-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Stress sensing based on one dimensional photonic crystal nano beam\",\"authors\":\"F. Hsiao, Zhen-Hong Yang\",\"doi\":\"10.1109/ISSNIP.2014.6827615\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si<sub>3</sub>N<sub>4</sub> layer is deposited above the waveguide. The thermal stress between Si/Si<sub>3</sub>N<sub>4</sub> induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.\",\"PeriodicalId\":269784,\"journal\":{\"name\":\"2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-04-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSNIP.2014.6827615\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSNIP.2014.6827615","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Stress sensing based on one dimensional photonic crystal nano beam
We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si3N4 layer is deposited above the waveguide. The thermal stress between Si/Si3N4 induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.