薄膜材料疲劳裂纹扩展行为研究:疲劳试验方法及控制疲劳裂纹扩展速率的因素

T. Torii, K. Honda, Akira Matsuba, Mutsumi Tanida
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引用次数: 3

摘要

目前,电子封装多采用薄膜等尺寸较小的材料。本文研究了一种膜疲劳试验方法,该方法可以观察基板上连接通孔的膜在推拉循环载荷作用下的疲劳裂纹扩展行为。采用边界元法建立了该试验方法的解析模型,从而可以从断裂力学(k值和j积分)的角度对膜疲劳断裂进行定量处理。研究了100 μm厚的商品级铁薄膜与基板上的圆形孔或椭圆孔结合的疲劳裂纹扩展性能。因此,利用基于实测裂纹张开位移的应力强度因子ΔK est,可以用广泛应用于体试样的有效应力强度因子ΔK eff来理解薄膜的疲劳裂纹扩展行为。
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Study of Fatigue Crack Propagation Behavior of Film Materials : Fatigue Testing Method and Factors Controlling Fatigue Crack Propagation Rates
At present, materials with small dimensions such as thin films are often used in electronic packaging. This study concerns a film fatigue testing method, which makes it possible to observe the fatigue crack propagation behavior on a film bonded to a through-hole in a base plate subjected to push-pull cyclic loads. An analytical model for this testing method is presented using a boundary element method, so that the film fatigue fracture can be treated quantitatively in terms of fracture mechanics (K-values and J-integrals). The fatigue crack growth properties were examined for commercial-grade iron films with 100 μm thickness bonded to either a circular or an elliptical hole in the base plate. As a result, using the stress intensity factor based on the measured crack opening displacement, ΔK est , the fatigue crack propagation behavior of the film could be understood in terms of the effective stress intensity factor widely used in the bulk specimen, ΔK eff .
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