QPM GaAs晶体扩散键合工艺的优化

Chenxu Wang, H. Bian, Zhanda Zhu, Yongling Hui, H. Lei, Qiang Li
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引用次数: 0

摘要

准相位匹配晶体是制备CO2激光倍频中红外激光器的一种有效方法。制备扩散键合晶体的主要问题是缺陷的控制。本文通过优化键合温度、压力、时间等参数来降低界面损耗。当键合温度为700℃,键合压力为0.27kg/mm2时,制备出49层QPM GaAs晶体,单层界面损耗小于0.13%。在波长为10.56μm、脉冲能量为219 mJ、脉冲宽度为110 ns的CO2激光器中,利用所制备的QPM-GaAs晶体产生二次谐波,可获得23%的SHG效率。
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Optimization of diffusion bonding process for QPM GaAs crystals
It’s an effective method to produce mid infrared laser that CO2 laser frequency doubling by using quasi-phase-matched (QPM) crystal. The main problem in the preparing diffusion bonding crystal is controlling the defects. In this paper, the bonding temperature, pressure, time and other parameters are optimized to reduce the interface loss. When the bonding temperature is 700°C , the bonding pressure of 0.27kg/mm2, a 49 layer QPM GaAs crystal was fabricated, and the interface loss of the single layer was less than 0.13%. Using the prepared QPM-GaAs crystal for second harmonic generation, 23% SHG efficiency was achieved in a CO2 laser with 10.56μm wavelength, 219 mJ pulse energy and 110 ns pulse width.
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