一种选择性金属化、微加工的w波段弯曲线行波管电路

2008 IEEE International Vacuum Electronics Conference Pub Date : 2008-04-22 DOI:10.1109/IVELEC.2008.4556322

S. Sengele, Hongrui Jiang, J. Booske, D. W. van der Weide, C. Kory, L. Ives

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引用次数: 17

摘要

本文描述了一种选择性金属化工艺的发展，这种金属化工艺只能在微加工的凸起弯曲线脊的顶部进行金属化。这种制造工艺在毫米波和太赫兹慢波行波管结构的发展中具有独特的潜力。制作过程将被描述和最新的图像和测量数据将被呈现。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A selectively metallized, microfabricated W-band meander line TWT circuit

The development of a selective metallization process capable of metallizing only the top of a microfabricated, raised meander line ridge is described. This fabrication process has unique potential in the development of millimetre-wave and terahertz regime slow wave structures for travelling wave tubes. The fabrication process will be described and the latest images and measured data will be presented.

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2008 IEEE International Vacuum Electronics Conference

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