太赫兹波无损检测介质层状结构中的小缺陷

I.S. Scherbatko, Y. Kuleshov
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引用次数: 0

摘要

随着可靠的微波功率源和探测器的研制,利用毫米波对介电材料进行无损检测已成为现实。然而,小缺陷只有在其尺寸与测试信号的波长相当或大于测试信号的波长时才能有效散射。太赫兹和亚毫米技术的发展取得了重大进展,使得开发用于介电层状结构小缺陷检测的无损检测系统成为可能。迄今为止,时域太赫兹光谱(THz- tds)已成为扫描介质层状结构和发现透明介质层状结构不均匀性的最常用方法[1,2]。考虑到太赫兹- tds系统非常昂贵,后续数据处理测量耗时长,提出了一种新的依赖偏振的缺陷检测方法。
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Detection of small defects by THz-waves for non-destructive testing in dielectric layered structures
Non-destructing testing of dielectric materials by mm electromagnetic waves has been implemented since reliable sources of microwave power and detectors were developed. However, small defect scatters effectively only when its size is comparable or greater than a wavelength of the testing signal. Significant progress in terahertz and sub-mm techniques development made possible the development of non-destructive testing systems for small defects in dielectric layered structures detection. Up to date a time-domain THz spectroscopy (THz-TDS) has been the most popular method for scanning dielectric layered structures and finding inhomogenities in transparent dielectric layered structures [1,2]. Taking into account that THz-TDS systems are very expensive and measurements with following data processing are time-consuming a new polarization-dependent method for defect detection is considered.
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