用于力传感的磁微柱传感器

A. Alfadhel, J. Kosel
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引用次数: 11

摘要

报道了一种由生物动力、磁性和高弹性微柱集成在磁场传感元件上的力传感器系统。微柱由磁性纳米线和聚二甲基硅氧烷组成的纳米复合材料制成。纳米线的永磁特性允许远程操作,而无需额外的磁场来磁化纳米线,从而简化了小型化和系统集成。我们通过实现触觉传感元件来展示这一概念的潜力。所开发的传感器元件工作功耗为75 μW,检测范围为0-120 kPa,分辨率为2.7 kPa,易于在大范围内调谐。
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Magnetic micropillar sensors for force sensing
A force sensor system consisting of bioinspired, magnetic and highly elastic micropillars integrated on a magnetic field sensing element is reported. The micro-pillars are made of a nanocomposite consisting of magnetic nanowires incorporated into polydimethylsiloxane. The permanent magnetic behavior of the nanowires allows remote operation without an additional magnetic field to magnetize the nanowires, which simplifies miniaturization and system integration. We demonstrate the potential of this concept by realizing a tactile sensing element. The developed sensor element operates at power consumption of 75 μW and has a detection range between 0-120 kPa and a resolution of 2.7 kPa, which can easily be tuned in a wide range.
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