前真空压力范围内基于阴极电弧的等离子体阴极电子源形成脉冲低能电子束

A. Kazakov, A. Medovnik, N. Panchenko, E. Oks
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摘要

本文研究了等离子体阴极电子源在前真空压力范围内利用阴极电弧形成脉冲大半径低能(可达10 keV)电子束。利用空心阳极和再分布电极可产生宽而均匀的等离子体。将空心阳极的直径和发射孔(金属网覆盖的阳极平面部分的窗口)的直径增加到空心阳极的内径,可以提高电弧等离子体的电子提取效率。但随着发射孔径的增大,回流离子流对发射(电弧)等离子体的影响加剧,导致最大工作气体压力降低。使用两种不同电池尺寸的发射网格,在高达15 Pa (N2)的气压下,产生的电子束电流可达数十安培,脉冲持续时间可达5 ms。在空心阳极内安装大单元尺寸的第一网格,在侧面覆盖面向提取器的发射窗口的第二细网格(网格之间的最佳距离约为2mm),提供了电弧等离子体提取电子的最大工作压力和最佳效率(低压下)。再分布电极和两个发射网格的使用增加了电子束上电流密度分布的均匀性。
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Formation of Pulsed Low-Energy Electron Beam by a Plasma-Cathode Electron Source Based on Cathodic Arc in the Forevacuum Pressure Range
The research of formation of pulsed large-radius low-energy (up to 10 keV) electron beam by a plasma-cathode electron source based on the cathodic arc in the forevacuum pressure range is presented. A hollow anode and a redistributing electrode have been used to generate broad, uniform emission plasma. Increase of the diameter of hollow anode and increase of diameter of emission aperture (window in the plane part of the anode covered by metal mesh) up to inner diameter of hollow anode has provided, as expected, an increase in efficiency of electron extraction from the arc plasma. However, increase of emission aperture has led to decrease maximal operating gas pressure due to intensification of the influence of back-streaming ion flow on the emission (arc) plasma. The use of two emission meshes with different cell sizes has provided generation electron beam with current of up to tens of amperes and pulse duration up to 5 ms at gas pressure of up to 15 Pa (N2). The maximal operating pressure and optimal efficiency of electron extraction from arc plasma (at low pressure) are provided in case of the first mesh with large cell sizes is mounted inside the hollow anode, and second fine mesh covers the emission window on side, facing the extractor (optimal distance between meshes is about 2 mm). The use of the redistributing electrode and two emission meshes provided an increase in the uniformity of the current density distribution across the electron beam.
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