Omer Lavy, L. Gal, Danny Weicherman, S. Stolyarova, E. David, A. Saad, Y. Nemirovsky
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MEMS tunable capacitor with wide tuning range using multiple voltage sources
This paper presents a MEMS surface micro-machined varactor. The dynamic range of this class of varactors is governed by pull-in instability which is ideally one-third of the initial gap between the two electrodes. This paper presents a simple T varactor, whose pull-in stability and hence its dynamic range are increased by applying two independent voltage sources. We introduce an electromechanical model for the proposed structure, and a full analytic solution to the attached pull in problem. Our varactor has capacitance ratio of 2.43:1.
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