基于级联前馈微环谐振器的窄带宽陡滚降低损耗硅光滤波器

Lei Zhang, Haoyan Wang, Jincheng Dai, Xin Fu, Lin Yang
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摘要

提出了两种基于级联前馈微环谐振器(MRRs)的集成光带通滤波结构。我们用散射矩阵法将这两种滤波器的性能与由相同数量环腔组成的传统高阶MRRs进行了比较。对于相同的目标3db带宽为15 GHz或5 GHz时,所提出的光滤波器具有不同的线形、更低的插入损耗和不同的滚降特性。作为概念验证,我们使用深紫外光刻技术在绝缘体上硅(SOI)衬底上制造了具有三个mrr的器件。该器件的3db带宽为~ 25ghz,片内插入损耗为−2.5 dB。在比通带中心低- 10 dB和- 20 dB的边带点处,滚降率约为45 dB/nm。相比之下,器件中单个MRR的传输滚降率在- 10 dB和- 20 dB边带点分别为~22 dB/nm和~6 dB/nm。与传统的高阶mrr相比,我们的方案具有更低的热串扰,因为谐振器不是紧密耦合的,因此可以放置在很远的地方。用微盘谐振器或高阶磁阻器代替磁阻器可以进一步提高结构的性能。
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Low-loss Silicon Optical Filter with Narrow Bandwidth and Steep Roll-off Based on Cascaded Feed-forward Microring Resonators
We propose two kinds of architectures based on cascaded feed-forward microring resonators (MRRs) for integrated optical bandpass filtering. We compare the performance of the two proposed filters with traditional high-order MRRs composed of the same number of ring cavities using the scattering matrix method. For the same target 3 dB bandwidth of 15 GHz or 5 GHz, the proposed optical filters shows different line shape with lower insertion loss and different roll-off feature. As a proof of concept, we fabricate the device with three MRRs on a silicon-on-insulator (SOI) substrate using deep ultraviolet photolithography. The device shows a 3 dB bandwidth of ~25 GHz and an on-chip insertion loss of −2.5 dB. The roll-off rates are around 45 dB/nm at the sideband points −10 dB and −20 dB lower than the passband center. In contrast, the transmission’s roll-off rates of a single MRR in the device are ~22 dB/nm and ~6 dB/nm at the −10 dB and −20 dB sideband points, respectively. Compared with traditional high-order MRRs, our schemes have lower thermal crosstalk because the resonators are not tightly coupled and thus can be placed far apart. The performance of the proposed structures can be further improved by replacing the MRRs with micro-disk resonators or high-order MRRs.
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