{"title":"等离子体蚀刻反应器中电子能量分布函数和速率常数的参数化研究","authors":"J. Shon, E. Meeks, R. Kee","doi":"10.1109/PLASMA.1994.588746","DOIUrl":null,"url":null,"abstract":"The resulting reaction-rate coefficients are used to generate standard Arrhenius fits for the rate constants as a function of average electron energy. These reaction-rate coefficients are then employed in a plasma reactor model through a Chemkin interface. Results from the reactor model indicate the dependence of ion, electron, and neutral species concentrations on the assumptions inherent in the reactionrate determinations. We present differences between results","PeriodicalId":254741,"journal":{"name":"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)","volume":"898 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Parametric Studies Of Electron-energy -distribution-function And Rate Constants For Plasma-etching Reactors\",\"authors\":\"J. Shon, E. Meeks, R. Kee\",\"doi\":\"10.1109/PLASMA.1994.588746\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The resulting reaction-rate coefficients are used to generate standard Arrhenius fits for the rate constants as a function of average electron energy. These reaction-rate coefficients are then employed in a plasma reactor model through a Chemkin interface. Results from the reactor model indicate the dependence of ion, electron, and neutral species concentrations on the assumptions inherent in the reactionrate determinations. We present differences between results\",\"PeriodicalId\":254741,\"journal\":{\"name\":\"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)\",\"volume\":\"898 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-06-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PLASMA.1994.588746\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.1994.588746","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Parametric Studies Of Electron-energy -distribution-function And Rate Constants For Plasma-etching Reactors
The resulting reaction-rate coefficients are used to generate standard Arrhenius fits for the rate constants as a function of average electron energy. These reaction-rate coefficients are then employed in a plasma reactor model through a Chemkin interface. Results from the reactor model indicate the dependence of ion, electron, and neutral species concentrations on the assumptions inherent in the reactionrate determinations. We present differences between results
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