Al+MgF2薄膜的远紫外反射率

Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI:10.1364/OIC.2019.FB.3

Jinyan Wang, Jinlong Zhang, Hongfei Jiao, Cheng Xinbin, Wang Zhanshan

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摘要

制备了氟化物膜保护的铝镜面，研究了退火对反射率的影响。结果表明，在121.6nm波长处的反射率达到85%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The reflectance of the Al+MgF2 film in the Far-Ultraviolet

The Al mirror protected with a fluoride film was produced, and the effect of the annealing to the reflectance was investigated. It showed the reflectance >85% in the wavelength of 121.6nm has been achieved.

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Optical Interference Coatings Conference (OIC) 2019

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