{"title":"带有超软全聚合物压电极体的按钮能量收集器","authors":"Jia Lu, Yuji Suzuki","doi":"10.1109/PowerMEMS54003.2021.9658397","DOIUrl":null,"url":null,"abstract":"Piezoelectrets are porous space-charged polymers with high piezoelectric coefficients and excellent softness. They have found applications in making vibrational or kinetic energy harvesters, acoustic sensors and so on. In the present study, an all-polymer multilayer piezoelectret made from thin parylene-C membranes, high-performance dip-coated CYTOP electrets and flexible PEDOT:PSS electrodes is micro-fabricated for push-button energy harvester. To avoid electret discharge, mesh-like spacers are formed in each layer. The piezoelectret is charged with soft X-ray to its critical voltage for air breakdown. Up to 41 μJ electrical energy has been generated with the 8-layer prototype at a pushing force of only 1 N. Its piezoelectric coefficient d33 reaches 125 nC/N and its energy density is 62 μJ/cm3/N, which is much higher than that of commercialized push-button energy harvesters.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Push-Button Energy Harvester with Ultra-Soft All-Polymer Piezoelectret\",\"authors\":\"Jia Lu, Yuji Suzuki\",\"doi\":\"10.1109/PowerMEMS54003.2021.9658397\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Piezoelectrets are porous space-charged polymers with high piezoelectric coefficients and excellent softness. They have found applications in making vibrational or kinetic energy harvesters, acoustic sensors and so on. In the present study, an all-polymer multilayer piezoelectret made from thin parylene-C membranes, high-performance dip-coated CYTOP electrets and flexible PEDOT:PSS electrodes is micro-fabricated for push-button energy harvester. To avoid electret discharge, mesh-like spacers are formed in each layer. The piezoelectret is charged with soft X-ray to its critical voltage for air breakdown. Up to 41 μJ electrical energy has been generated with the 8-layer prototype at a pushing force of only 1 N. Its piezoelectric coefficient d33 reaches 125 nC/N and its energy density is 62 μJ/cm3/N, which is much higher than that of commercialized push-button energy harvesters.\",\"PeriodicalId\":165158,\"journal\":{\"name\":\"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)\",\"volume\":\"54 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-12-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PowerMEMS54003.2021.9658397\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PowerMEMS54003.2021.9658397","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Push-Button Energy Harvester with Ultra-Soft All-Polymer Piezoelectret
Piezoelectrets are porous space-charged polymers with high piezoelectric coefficients and excellent softness. They have found applications in making vibrational or kinetic energy harvesters, acoustic sensors and so on. In the present study, an all-polymer multilayer piezoelectret made from thin parylene-C membranes, high-performance dip-coated CYTOP electrets and flexible PEDOT:PSS electrodes is micro-fabricated for push-button energy harvester. To avoid electret discharge, mesh-like spacers are formed in each layer. The piezoelectret is charged with soft X-ray to its critical voltage for air breakdown. Up to 41 μJ electrical energy has been generated with the 8-layer prototype at a pushing force of only 1 N. Its piezoelectric coefficient d33 reaches 125 nC/N and its energy density is 62 μJ/cm3/N, which is much higher than that of commercialized push-button energy harvesters.
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