用于研究薄膜性质的超声表面波

EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR Pub Date : 1989-12-31 DOI:10.1002/PSSA.2211320229

R. Küchler

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引用次数: 16

摘要

用非线性运动方程的近似描述了超声表面波在薄膜沉积过程中传播速度的变化。考虑了沉积膜中残余应力对扩散速度的影响。作为实际应用的例子，研究了在钢筋表面沉积TiN膜后表面波的速度变化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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ULTRASONIC SURFACE WAVES FOR STUDYING THE PROPERTIES OF THIN FILMS

The change of the spreading velocity of ultrasonic surface waves by thin film deposition is described by an approximation of the nonlinear equations of motion. The effect of residual stress in deposited films on the spreading velocity is considered. As an example for practical applications, the velocity change of surface waves after TiN film deposition on steel bars is investigated.

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EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR

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