在可见范围内为SiN平台开发基本构建块

Joaquín Faneca Ruedas, Jad Sabek, T. Domínguez Bucio, F. Gardes, Carlos Domínguez Horna
{"title":"在可见范围内为SiN平台开发基本构建块","authors":"Joaquín Faneca Ruedas, Jad Sabek, T. Domínguez Bucio, F. Gardes, Carlos Domínguez Horna","doi":"10.1109/GFP51802.2021.9673833","DOIUrl":null,"url":null,"abstract":"Integrated silicon photonics in the visible range is one of the areas that is emerging and growing in the market for different applications, such as: biosensing, optogenetics, quantum computing, imaging and display, fluorescence microscopy, cytometry, tomography, LIDAR and Lifi. Here, we present the first steps to build a process design kit of components in the visible range centered at 633 nm using a LPCVD silicon nitride platform. The first basic elements are presented (grating couplers, single mode waveguides and a MMI).","PeriodicalId":158770,"journal":{"name":"2021 IEEE 17th International Conference on Group IV Photonics (GFP)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Basic building blocks development for a SiN platform in the visible range\",\"authors\":\"Joaquín Faneca Ruedas, Jad Sabek, T. Domínguez Bucio, F. Gardes, Carlos Domínguez Horna\",\"doi\":\"10.1109/GFP51802.2021.9673833\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Integrated silicon photonics in the visible range is one of the areas that is emerging and growing in the market for different applications, such as: biosensing, optogenetics, quantum computing, imaging and display, fluorescence microscopy, cytometry, tomography, LIDAR and Lifi. Here, we present the first steps to build a process design kit of components in the visible range centered at 633 nm using a LPCVD silicon nitride platform. The first basic elements are presented (grating couplers, single mode waveguides and a MMI).\",\"PeriodicalId\":158770,\"journal\":{\"name\":\"2021 IEEE 17th International Conference on Group IV Photonics (GFP)\",\"volume\":\"2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 IEEE 17th International Conference on Group IV Photonics (GFP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/GFP51802.2021.9673833\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 17th International Conference on Group IV Photonics (GFP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GFP51802.2021.9673833","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

集成硅光子学在可见光范围内是市场上新兴和增长的不同应用领域之一,如:生物传感、光遗传学、量子计算、成像和显示、荧光显微镜、细胞术、断层扫描、激光雷达和Lifi。在这里,我们介绍了使用LPCVD氮化硅平台构建以633 nm为中心的可见范围内组件的工艺设计套件的第一步。介绍了第一个基本元件(光栅耦合器、单模波导和MMI)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Basic building blocks development for a SiN platform in the visible range
Integrated silicon photonics in the visible range is one of the areas that is emerging and growing in the market for different applications, such as: biosensing, optogenetics, quantum computing, imaging and display, fluorescence microscopy, cytometry, tomography, LIDAR and Lifi. Here, we present the first steps to build a process design kit of components in the visible range centered at 633 nm using a LPCVD silicon nitride platform. The first basic elements are presented (grating couplers, single mode waveguides and a MMI).
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Experimental demonstration of reservoir computing with a silicon resonator and time multiplexing Broadband and Compact Polarization Splitter-Rotator Based on Subwavelength-Grating-Slot-Assisted Adiabatic Coupler for the Silicon-on-Insulator Platform Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform Optimization of Tapers and Interlayer Transitions via Adiabatic Loss Limiting 60-GHz-bandwidth O-band Membrane InGaAlAs Electro-Absorption Modulator on Si Platform
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1