博世微机电系统的未来是MEMS设计考虑

Mike Schwarz, J. Franz, M. Reimann
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引用次数: 11

摘要

罗伯特博世有限公司是全球最大的汽车和消费微机械传感器供应商。在汽车和消费者应用中实现高质量和高成本效益需要先进的设计流程来满足这些标准。本文提出了一种保证微机械传感器高功能性和成品率的方法和算法。
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The future is MEMS design considerations of microelectromechanical systems at Bosch
The Robert Bosch GmbH is the world's largest supplier of micromechanical sensors in automotive and consumer applications. Achieving a high quality and cost effectiveness in automotive and consumer applications an advanced design flow is required to fulfill these criteria. In here a method and algorithm is presented to ensure a high functionality and yields of micromechanical sensors.
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