J. McBride, S. Spearing, L. Jiang, C. Chianrabutra
{"title":"金涂层碳纳米管表面作为MEMS器件的低力电触点:第二部分,精细传递机制","authors":"J. McBride, S. Spearing, L. Jiang, C. Chianrabutra","doi":"10.1109/HOLM.2011.6034800","DOIUrl":null,"url":null,"abstract":"Material transfer in switching contacts is considered at very low currents, (below 20mA). The transfer process is critical to a wide range of electronic switching technologies and is a limiting factor for MEMs relays. A test system is described and characterized for bench-marking surfaces. This is followed by a study of Multi-walled CNT's (MWCNT's), synthesized on a silicon planar and sputter coated with a gold film. The planar surfaces are mounted on the tip of a piezo-electric actuator and mated with a Au coated hemispherical surface. The switching contacts are tested under conditions typical of MEMS relay applications; 4V, 1mA; with a static contact force of 1mN, results are presented on the bounce process and on the opening characteristic with respect to the melting and boiling voltages for the materials tested.","PeriodicalId":197233,"journal":{"name":"2011 IEEE 57th Holm Conference on Electrical Contacts (Holm)","volume":"82 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-10-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"Gold Coated Carbon-Nanotube Surfaces as Low Force Electrical Contacts for MEMS Devices: Part II, Fine Transfer Mechanisms\",\"authors\":\"J. McBride, S. Spearing, L. Jiang, C. Chianrabutra\",\"doi\":\"10.1109/HOLM.2011.6034800\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Material transfer in switching contacts is considered at very low currents, (below 20mA). The transfer process is critical to a wide range of electronic switching technologies and is a limiting factor for MEMs relays. A test system is described and characterized for bench-marking surfaces. This is followed by a study of Multi-walled CNT's (MWCNT's), synthesized on a silicon planar and sputter coated with a gold film. The planar surfaces are mounted on the tip of a piezo-electric actuator and mated with a Au coated hemispherical surface. The switching contacts are tested under conditions typical of MEMS relay applications; 4V, 1mA; with a static contact force of 1mN, results are presented on the bounce process and on the opening characteristic with respect to the melting and boiling voltages for the materials tested.\",\"PeriodicalId\":197233,\"journal\":{\"name\":\"2011 IEEE 57th Holm Conference on Electrical Contacts (Holm)\",\"volume\":\"82 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-10-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 IEEE 57th Holm Conference on Electrical Contacts (Holm)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/HOLM.2011.6034800\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 IEEE 57th Holm Conference on Electrical Contacts (Holm)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/HOLM.2011.6034800","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Gold Coated Carbon-Nanotube Surfaces as Low Force Electrical Contacts for MEMS Devices: Part II, Fine Transfer Mechanisms
Material transfer in switching contacts is considered at very low currents, (below 20mA). The transfer process is critical to a wide range of electronic switching technologies and is a limiting factor for MEMs relays. A test system is described and characterized for bench-marking surfaces. This is followed by a study of Multi-walled CNT's (MWCNT's), synthesized on a silicon planar and sputter coated with a gold film. The planar surfaces are mounted on the tip of a piezo-electric actuator and mated with a Au coated hemispherical surface. The switching contacts are tested under conditions typical of MEMS relay applications; 4V, 1mA; with a static contact force of 1mN, results are presented on the bounce process and on the opening characteristic with respect to the melting and boiling voltages for the materials tested.