薄膜内禀应力演化及IMC生长与晶须生长的关系

C. L. Rodekohr, G. Flowers, M. Bozack, R. Jackson, R. Martens, Z. Zhao, E. R. Crandall, V. Starman, T. Bitner, J. Street
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引用次数: 6

摘要

本文探讨了锡晶须的成核和生长是由薄膜净压缩本征应力驱动的。在这种观点下,应该存在一个阈值应力水平,使Sn晶须形成核;此外,须状结构可显著减轻压应力。我们研究了晶须成核的阈值应力,并测量了黄铜基体上锡晶须生长过程中释放的应力量。利用新的机器视觉技术对传统的弯梁分析进行应力演化评估。通过FIB切片、EDX成像和电子显微镜观察到Cu-Sn金属间层的晶须形核和生长。结果表明,应力演化与晶须成核和金属间生长的关系不大。此外,我们观察了压缩和接近中性薄膜应力条件下的晶须密度。
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Correlation of Intrinsic Thin Film Stress Evolution and IMC Growth with Whisker Growth
This paper explores the notion that the nucleation and growth of Sn whiskers is motivated by net compressive intrinsic thin film stresses. In this view, a threshold level of stress should exist at which Sn whiskers nucleate; furthermore, whiskering will relieve the compressive stress by a measurable amount. We examine the threshold stress for whisker nucleation and measure the amount of stress relieved during Sn whisker growth on brass substrates. The stress evolution has been evaluated by traditional bent beam analysis via novel machine vision techniques. Whisker nucleation and growth of the Cu-Sn intermetallic layer was observed by FIB sectioning, EDX mapping, and electron microscopy. Results show that the measured stress evolution shows little correlation to whisker nucleation and intermetallic growth. Further, we observe whisker population densities under both compressive and near neutral thin film stress conditions.
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