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引用次数: 8
摘要
本文给出了czo chralski (CZ)硅晶体生长过程中三维非定常熔体湍流对流的数值模拟结果。结合大涡模拟和雷诺平均方法建立了一个模型来预测未解湍流运动的贡献。该模型在工业CZ配置的不同生长条件下进行了检验。给出了熔体瞬时和时间平均行为的数据，并与实验观察结果进行了比较。根据光谱特性分析了熔体中的热波动，并与热电偶和光学传感器进行的温度测量进行了比较。本文选自第二届国际湍流和剪切流动现象研讨会论文集(KTH-Stockholm, 2001年6月27-29日)，作者E Lindborg, A Johansson, J Eaton, J Humphrey, N Kasagi, M Leschziner和M Sommerfeld。
MODELING OF TURBULENT MELT CONVECTION DURING CZOCHRALSKI BULK CRYSTAL GROWTH
We present the results of numerical simulation of three-dimensional unsteady turbulent melt convection duringCzo chralski (CZ) silicon crystal growth. A model combining the large-eddy simulation and Reynolds-averaged approaches has been developed to predict the contribution of unresolved turbulent motion. The model is examined for different growth conditions in an industrial CZ configuration. Data illustrating instantaneous and time-averaged behaviour of the melt are presented and compared with experimental observations. Thermal fluctuations in the melt are analysed with respect to spectral characteristics and compared with the temperature measurements performed by thermocouples and an optical sensor. This article was chosen from selected Proceedings of the Second International Symposium on Turbulence and Shear Flow Phenomena (KTH-Stockholm, 27-29 June 2001) ed E Lindborg, A Johansson, J Eaton, J Humphrey, N Kasagi, M Leschziner and M Sommerfeld.
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