{"title":"一种基于柔性锚定膜的射频前端射频欧姆继电器可调的新型射频MEMS技术","authors":"O. Millet","doi":"10.23919/EUMC.2012.6459130","DOIUrl":null,"url":null,"abstract":"This paper presents a new RF MEMS relay dedicated to mobile applications. The challenges, the MEMS technology & the packaging solution are introduced.","PeriodicalId":266910,"journal":{"name":"2012 42nd European Microwave Conference","volume":"30 2","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A new RF MEMS technology enabling tunability for RF front-end RF ohmic relay based on a flexible anchorless membrane\",\"authors\":\"O. Millet\",\"doi\":\"10.23919/EUMC.2012.6459130\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a new RF MEMS relay dedicated to mobile applications. The challenges, the MEMS technology & the packaging solution are introduced.\",\"PeriodicalId\":266910,\"journal\":{\"name\":\"2012 42nd European Microwave Conference\",\"volume\":\"30 2\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 42nd European Microwave Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/EUMC.2012.6459130\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 42nd European Microwave Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/EUMC.2012.6459130","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}