{"title":"压电盘&微机械超声换能器的仿真","authors":"S. Atheeth, M. Arora","doi":"10.1109/CONECCT55679.2022.9865705","DOIUrl":null,"url":null,"abstract":"The paper reports simulation of piezoelectric disc and its extension to understand pMUT operation. The theoretical formulation matches the simulation results for piezo disc and pMUT at fundamental mode of vibration within 5% of each other. Stress formation in layers, central displacement, pressure output at 3mm distance for both PZT and AlN (Aluminium Nitride) as the piezo layer in pMUT are captured via the simulation model and compared.","PeriodicalId":380005,"journal":{"name":"2022 IEEE International Conference on Electronics, Computing and Communication Technologies (CONECCT)","volume":"85 ","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Simulation of Piezoelectric Disc & Micromachined Ultrasound Transducer\",\"authors\":\"S. Atheeth, M. Arora\",\"doi\":\"10.1109/CONECCT55679.2022.9865705\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper reports simulation of piezoelectric disc and its extension to understand pMUT operation. The theoretical formulation matches the simulation results for piezo disc and pMUT at fundamental mode of vibration within 5% of each other. Stress formation in layers, central displacement, pressure output at 3mm distance for both PZT and AlN (Aluminium Nitride) as the piezo layer in pMUT are captured via the simulation model and compared.\",\"PeriodicalId\":380005,\"journal\":{\"name\":\"2022 IEEE International Conference on Electronics, Computing and Communication Technologies (CONECCT)\",\"volume\":\"85 \",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-07-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE International Conference on Electronics, Computing and Communication Technologies (CONECCT)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CONECCT55679.2022.9865705\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Conference on Electronics, Computing and Communication Technologies (CONECCT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CONECCT55679.2022.9865705","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Simulation of Piezoelectric Disc & Micromachined Ultrasound Transducer
The paper reports simulation of piezoelectric disc and its extension to understand pMUT operation. The theoretical formulation matches the simulation results for piezo disc and pMUT at fundamental mode of vibration within 5% of each other. Stress formation in layers, central displacement, pressure output at 3mm distance for both PZT and AlN (Aluminium Nitride) as the piezo layer in pMUT are captured via the simulation model and compared.
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