{"title":"从x射线强度重建薄膜轮廓的严格数学模型","authors":"S. Slavyanov, C. Ern, H. Dosch","doi":"10.1109/DD.2000.902369","DOIUrl":null,"url":null,"abstract":"We present a novel theoretical approach which allows the analytical reconstruction of profile functions associated with thin films as observed by array diffraction. Our concept is based on the representation of the profile function by appropriate linear differential equations with polynomial coefficients that have straight forward Fourier transforms. Several theoretical examples of practical importance are discussed.","PeriodicalId":184684,"journal":{"name":"International Seminar Day on Diffraction Millennium Workshop (IEEE Cat. No.00EX450)","volume":"5 9","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Rigorous mathematical models for the reconstruction of thin films profiles from X-ray intensities\",\"authors\":\"S. Slavyanov, C. Ern, H. Dosch\",\"doi\":\"10.1109/DD.2000.902369\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a novel theoretical approach which allows the analytical reconstruction of profile functions associated with thin films as observed by array diffraction. Our concept is based on the representation of the profile function by appropriate linear differential equations with polynomial coefficients that have straight forward Fourier transforms. Several theoretical examples of practical importance are discussed.\",\"PeriodicalId\":184684,\"journal\":{\"name\":\"International Seminar Day on Diffraction Millennium Workshop (IEEE Cat. No.00EX450)\",\"volume\":\"5 9\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Seminar Day on Diffraction Millennium Workshop (IEEE Cat. No.00EX450)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DD.2000.902369\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Seminar Day on Diffraction Millennium Workshop (IEEE Cat. No.00EX450)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DD.2000.902369","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Rigorous mathematical models for the reconstruction of thin films profiles from X-ray intensities
We present a novel theoretical approach which allows the analytical reconstruction of profile functions associated with thin films as observed by array diffraction. Our concept is based on the representation of the profile function by appropriate linear differential equations with polynomial coefficients that have straight forward Fourier transforms. Several theoretical examples of practical importance are discussed.
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