从MEMS到NEMS

{"title":"从MEMS到NEMS","authors":"T. Gotszalk","doi":"10.1007/978-3-030-21496-8_12","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":259133,"journal":{"name":"MEMS: Field Models and Optimal Design","volume":"277 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"From MEMS to NEMS\",\"authors\":\"T. Gotszalk\",\"doi\":\"10.1007/978-3-030-21496-8_12\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":259133,\"journal\":{\"name\":\"MEMS: Field Models and Optimal Design\",\"volume\":\"277 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"MEMS: Field Models and Optimal Design\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/978-3-030-21496-8_12\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"MEMS: Field Models and Optimal Design","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-3-030-21496-8_12","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}