硅(二乙基酰胺)混合物中的薄膜等离子化学合成

{"title":"硅(二乙基酰胺)混合物中的薄膜等离子化学合成","authors":"Н. И. Файнер, А. Г. Плеханов, Е. А. Максимовский, Ю. М. Румянцев","doi":"10.1134/s0132665118070053","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":296440,"journal":{"name":"Физика и химия стекла","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"ПЛАЗМОХИМИЧЕСКИЙ СИНТЕЗ ТОНКИХ ПЛЕНОК ГИДРОГЕНИЗИРОВАННОГО ОКСИКАРБОНИТРИДА КРЕМНИЯ ИЗ ГАЗОВОЙ СМЕСИ МЕТИЛТРИС(ДИЭТИЛАМИНО)СИЛАНА, АЗОТА И КИСЛОРОДА\",\"authors\":\"Н. И. Файнер, А. Г. Плеханов, Е. А. Максимовский, Ю. М. Румянцев\",\"doi\":\"10.1134/s0132665118070053\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":296440,\"journal\":{\"name\":\"Физика и химия стекла\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Физика и химия стекла\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1134/s0132665118070053\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Физика и химия стекла","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1134/s0132665118070053","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}